12/17/2011	9:48:42 PM	Main Vac valve closed
12/17/2011	9:50:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2011	9:50:48 PM	Recipe started at 9:50 PM
12/17/2011	9:50:48 PM	Helium valve closed
12/17/2011	9:50:48 PM	H2 valve closed
12/17/2011	9:50:48 PM	BCl3 valve closed
12/17/2011	9:50:48 PM	PH3 valve closed
12/17/2011	9:50:48 PM	SiCl4 pre valve closed
12/17/2011	9:50:48 PM	SiCl4 post valve closed
12/17/2011	9:50:48 PM	Main Vac valve closed
12/17/2011	9:50:48 PM	Bubbler valve closed
12/17/2011	9:50:48 PM	Bypass valve opened
12/17/2011	9:50:48 PM	Helium MFC set to  0.000000
12/17/2011	9:50:48 PM	H2 MFC set to  0.000000
12/17/2011	9:50:48 PM	BCl3 MFC set to  0.000000
12/17/2011	9:50:48 PM	PHl3 MFC set to  0.000000
12/17/2011	9:50:48 PM	SiCl4 MFC set to  0.000000
12/17/2011	9:50:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2011	9:50:48 PM	Tube furnace set to 0
12/17/2011	9:53:28 PM	Helium valve closed
12/17/2011	9:53:28 PM	H2 valve closed
12/17/2011	9:53:28 PM	BCl3 valve closed
12/17/2011	9:53:28 PM	PH3 valve closed
12/17/2011	9:53:28 PM	SiCl4 pre valve closed
12/17/2011	9:53:28 PM	SiCl4 post valve closed
12/17/2011	9:53:28 PM	Main Vac valve closed
12/17/2011	9:53:28 PM	Bubbler valve closed
12/17/2011	9:53:28 PM	Bypass valve opened
12/17/2011	9:53:28 PM	Helium MFC set to  0.000000
12/17/2011	9:53:28 PM	H2 MFC set to  0.000000
12/17/2011	9:53:28 PM	BCl3 MFC set to  0.000000
12/17/2011	9:53:28 PM	PHl3 MFC set to  0.000000
12/17/2011	9:53:28 PM	SiCl4 MFC set to  0.000000
12/17/2011	9:53:28 PM	Bypass solenoid MFC set to  0.000000
12/17/2011	9:53:28 PM	Tube furnace set to 0
12/17/2011	9:54:28 PM	Helium valve closed
12/17/2011	9:54:28 PM	H2 valve closed
12/17/2011	9:54:28 PM	BCl3 valve closed
12/17/2011	9:54:28 PM	PH3 valve closed
12/17/2011	9:54:28 PM	SiCl4 pre valve closed
12/17/2011	9:54:28 PM	SiCl4 post valve closed
12/17/2011	9:54:28 PM	Bypass valve closed
12/17/2011	9:54:28 PM	Bubbler valve closed
12/17/2011	9:54:28 PM	Main Vac valve opened
12/17/2011	9:54:28 PM	Helium MFC set to  0.000000
12/17/2011	9:54:28 PM	H2 MFC set to  0.000000
12/17/2011	9:54:28 PM	BCl3 MFC set to  0.000000
12/17/2011	9:54:28 PM	PHl3 MFC set to  0.000000
12/17/2011	9:54:28 PM	SiCl4 MFC set to  0.000000
12/17/2011	9:54:28 PM	Bypass solenoid MFC set to  0.000000
12/17/2011	9:54:28 PM	Tube furnace set to 0
12/17/2011	9:54:29 PM	Run finished at 9:54 PM
12/17/2011	9:54:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
